Align key including a multi-focal meta-lens and aligning apparatus including the align key

Korea, Republic of Patent

APP PUB NO KR-20240003705-A
SERIAL NO

20230065878

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Abstract

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Disclosed is an alignment key including a first multifocal meta lens having a plurality of first nanostructures, wherein the plurality of first nanostructures have a shape distribution forming two different focal lengths depending on the area, and a plurality of second nanostructures. The plurality of second nanostructures include a second multifocal meta lens having a shape distribution which forms the two focal lengths, which are different depending on the area.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDKRGYEONGGI DO ROAD SOUTH KOREA SAMSUNG SUWON CITY LINGTONG DISTRICT NO 129 SUWON GYEONGGI-DO

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Inventor(s)

Inventor Name Address
ARBABI AMIR -
HAN SEUNG HOON 446-712 GYEONGGI-DO
MCCLUNG ANDREW CORBY -

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