Radial flow reactor including glow discharge limitting shield
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United States of America
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-
Apr 1, 1980
Grant Date -
N/A
app pub date -
Sep 28, 1978
filing date -
Jan 22, 1976
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An improved radio frequency (rf) powered radial flow cylindrical reactor utilizes a gas shield which substantially limits the glow plasma discharge reaction to a section of the reactor over the semiconductor substrates which are to be coated. The gas shield permits the use of higher rf input power which contributes to the formation of protective films that have desirable physical and electrical characteristics.
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