Importance

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Abstract

Cryopump apparatus includes means for supplying cryogenic fluid, means for supplying higher temperature refrigerant fluid, a panel having heat exchange surfaces on respective opposite sides thereof, with a conduit conducting cryogenic fluid therethrough, and a zigzag passageway formed by opposite sides of two radiation shields in spaced relationship with each other having the panel therebetween. The radiation shields are spaced from the panel, optically enclosing the panel therewithin. Corresponding edges of adjacent shields define open bottom channel-configured passageways for flow of gas therethrough to respective heat exchange surfaces of a panel interjacent the shields. The shields include conduits for flow of refrigerant fluid therethrough. Heat insulative positioning spacer means contact two adjacent panels and a shield therebetween, maintaining the panels and shield in spaced relationship.

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First Claim