Metal selective polymer removal

United States of America

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Dec 22, 1998
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N/A
app pub date
Oct 31, 1996
filing date
Sep 3, 1992

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Abstract

A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.

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Patent Owner(s)

Patent Owner	Address
FSI INTERNATIONAL INC	MINNESOTA USA MINNESOTA

International Classification(s)

H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bohannon, Brynne K	Sachse, TX	3	133
Syverson, Daniel J	Chaska, MN	6	483

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Metal selective polymer removal

Number of patents in Portfolio can not be more than 2000

United States of America

08739885

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PATENT NO	RE36006
SERIAL NO	08739885
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08739885

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