Laser decapsulation method
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United States of America Patent
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Mar 1, 2011
Issued Date -
N/A
app pub date -
May 5, 2009
filing date -
May 10, 1999
priority date (Note) -
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Abstract
A decapsulation apparatus 100 has a laser 8 that removes plastic encapsulant from a device 24. Chamber 20 is sealed. Exhaust port 9 removes debris and fumes. The device 24 is positioned and scanned using an X, Y table 2. A hinged end 4 rotates the device to an acute angle of incidence with respect to a laser 8. Endpoint detector 10 senses the exposed integrated circuit and moves or shuts down the laser 8.
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