Liquid feed nozzle, wet treatment apparatus and wet treatment method
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United States of America Patent
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Jun 7, 2011
Grant Date -
N/A
app pub date -
Jan 26, 2005
filing date -
Nov 29, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The wet treatment liquid feed nozzle of the invention comprises an introducing path having an introducing port, a discharging path having a discharging port, a crossing section formed by causing the introducing path and the discharging path to cross at the other ends thereof, a nozzle assembly having an opening section opening to an object to be treated, provided at the crossing section, and pressure control means, for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated and the atmospheric pressure provided at least on the discharging path side so that the wet treatment liquid having been in contact with the object to be treated via the opening section does not flow to outside the discharging path.
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