Laser decapsulation method

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United States of America Patent

PATENT NO RE43980
SERIAL NO

13032199

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Abstract

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A decapsulation apparatus 100 has a laser 8 that removes plastic encapsulant from a device 24. Chamber 20 is sealed. Exhaust port 9 removes debris and fumes. The device 24 is positioned and scanned using an X, Y table 2. A hinged end 4 rotates the device to an acute angle of incidence with respect to a laser 8. Endpoint detector 10 senses the exposed integrated circuit and moves or shuts down the laser 8.

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Patent Owner(s)

  • INTERSIL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lowry, Robert K Indialantic, US 20 1150

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