Filters employing both acidic polymers and physical-adsorption media

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United States of America Patent

PATENT NO RE44536
SERIAL NO

13151161

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Abstract

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A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

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Patent Owner(s)

  • ENTEGRIS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goodwin, William M Medway, US 18 248
Grayfer, Anatoly Newton, US 18 469
Kinkead, Devon Holliston, US 17 511
Kishkovich, Oleg P Greenville, US 23 995
Ruede, David Berkeley, US 5 79

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