Formation of a lithium comprising structure on a substrate by ALD

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United States of America Patent

PATENT NO RE47325
SERIAL NO

15806846

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Abstract

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A method for the formation of lithium includes a layer on a substrate using an atomic layer deposition method. The method includes the sequential pulsing of a lithium precursor through a reaction chamber for deposition upon a substrate. Using further oxidizing pulses and or other metal containing precursor pulses, an electrolyte suitable for use in thin film batteries may be manufactured.

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Patent Owner(s)

  • UNIVERSITETET I OSLO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aaltonen, Titta Helsinki, FI 6 185
Alnes, Mari Endresen Oslo, NO 4 23
Fjellvåg, Helmer Oslo, NO 5 8
Nilsen, Ola Oslo, NO 7 56
Putkonen, Matti Espoo, FI 19 1390

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