Apparatus and method for providing uniform flow of gas

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United States of America Patent

PATENT NO RE47440
SERIAL NO

15678883

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Abstract

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Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectable with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.

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Patent Owner(s)

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APPLIED MATERIALS INCCALIFORNIA USA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Mei Saratoga, US 263 13093
Chu, David Campbell, US 28 376
Gungor, Faruk San Jose, US 13 30
Kao, Chien-Teh Sunnyvale, US 65 5549
Lam, Hyman San Jose, US 8 204
Ma, Paul F Santa Clara, US 60 381
Wu, Dien-Yeh San Jose, US 59 3042
Yudovsky, Joseph Campbell, US 155 3108

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