Apparatus and method for providing uniform flow of gas
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United States of America Patent
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Jun 18, 2019
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N/A
app pub date -
Aug 16, 2017
filing date -
Oct 19, 2011
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Abstract
Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectable with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.
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