Copper electrodeposition in microelectronics

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO RE49202
SERIAL NO

16030344

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An electrolytic plating method and composition for electrolytically plating Cu onto a semiconductor integrated circuit substrate having submicron-sized interconnect features. The composition comprises a source of Cu ions and a suppressor compound comprising polyether groups. The method involves superfilling by rapid bottom-up deposition at a superfill speed by which Cu deposition in a vertical direction from the bottoms of the features to the top openings of the features is substantially greater than Cu deposition on the side walls.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MACDERMID ENTHONE INC245 FREIGHT STREET WATERBURY CT 06702 06702

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Figura, Paul Orange, US 10 136
Hurtubise, Richard Clinton, US 35 310
Lin, Xuan Northford, US 36 416
Paneccasio,, Jr Vincent Madison, US 25 150

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Mar 6, 2026
7.5 Year Payment $3600.00 $1800.00 $900.00 Mar 6, 2030
11.5 Year Payment $7400.00 $3700.00 $1850.00 Mar 6, 2034
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00