Al-Cr-O COATING APPLIED WITH ELECTRIC ARC SPRAYING, CONTAINING Si, HAVING IMPROVED PERFORMANCE

Russian Federation Patent

PATENT NO 2632348
APP PUB NO RU-2014146776-A
SERIAL NO

2014146776

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FIELD: chemistry.SUBSTANCE: invention can be used for deposition of an oxide coating, in particular Al-Cr-O, onto a substrate by physical vapour deposition (PVD). The PVD coating is applied to the substrate surface in the chamber using a process gas containing a reactive gas, in particular oxygen, reacting with metal ions obtained from, at least, one target to deposit, at least, one layer consisting of Al, Cr, Si and O. At least, one target has an elemental composition represented by the formula AlCrSi, where 0.05≤y≤0.10 and 0.20≤x≤0.25.EFFECT: addition of Si prevents the formation of oxide islands on targets during the reaction coating process.14 cl, 5 dwg

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