Crystallization apparatus and crystallization method

Taiwan, Republic of China Patent

APP PUB NO TW-200500512-A
SERIAL NO

92132970

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Abstract

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A crystallization apparatus includes an illumination system which illuminates a phase shifter having a phase shift portion, and irradiates a polycrystal semiconductor film or an amorphous semiconductor film with a light beam having a predetermined light intensity distribution in which a light intensity is minimum in a point area corresponding to the phase shift portion of the phase shifter, thereby forming a crystallized semiconductor film, the phase shifter has four or more even-numbered phase shift lines which intersect at a point constituting the phase shift portion. An area on one side and an area on the other side of each phase shift line have a phase difference of approximately 180 degrees.

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Patent Owner(s)

Patent OwnerAddress
ADV LCD TECH DEV CT CO LTDJP

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Inventor(s)

Inventor Name Address
TANIGUCHI YUKIO TOKYO
MATSUMURA MASAKIYO KAMAKURA-SHI

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