Measurement method of micro particle, measurement system of micro particle, and manufacturing system of ultrapure water

Taiwan, Republic of China Patent

APP PUB NO TW-201447262-A
SERIAL NO

103111362

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Abstract

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The invention provides such technology: even in a status that abnormality is found in a measurement result of a counting portion for measuring micro particles in a sample water, the micro particles in the sample water can still be captured. A measurement method of micro particle is provided for the counting portion and a filting portion to operate together, wherein the counting portion measures the micro particles in the sample water, and the filting portion filters the sample water and captures the micro particles for an analysis by using a direct microscopic counts. Even in the status that abnormality is found in the measurement result of the counting portion, a step of filting the sample water would be continued.

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Patent Owner(s)

Patent OwnerAddress
KURITA WATER IND LTDJP

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Inventor(s)

Inventor Name Address
TANAKA YOICHI NAGANO

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