PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATION DEGRADATION

Taiwan, Republic of China Patent

APP PUB NO TW-202212864-A
SERIAL NO

110130801

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Abstract

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An optical system includes a bulk material including a fluorine (F)-containing optical material. The bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation. The environment includes at least one type of gas or vapor. The at least one type of gas or vapor includes polar molecules.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPUSONE TECHNOLOGY DRIVE MILPITAS CALIFORNIA 95035 US

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Inventor(s)

Inventor Name Address
CHEN GRACE LIBERTYVILLE IL
DERSTINE MATTHEW LOS GATOS CA
DELGADO GILDARDO 5945 LINWOOD CMN LIVERMORE CALIFORNIA 4550 4550
ZHUANG GUORONG VERA ANN ARBOR MICHIGAN 48105
SAVEE JOHN SAN FRANCISCO 94131
BUTAEVA EVGENIIA 185 ESTANCIA DRIVE APT 329 SAN JOSE CALIFORNIA 95134 95134
LOPEZ LOPEZ GARY V PE

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