ELECTROSTATIC CHUCK, AND METHOD OF FORMING ELECTROSTATIC CHUCK

Taiwan, Republic of China Patent

APP PUB NO TW-202232656-A
SERIAL NO

111100161

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Abstract

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Electrostatic chucks and methods of forming electrostatic chucks are disclosed. Exemplary electrostatic chucks include a ceramic body, a device embedded within the ceramic body, and an interface layer formed overlying the device. Exemplary methods include providing ceramic precursor material within a mold, providing a device, coating the device with an interface material to form a coated device, placing the coated device on or within the ceramic precursor material, and sintering the ceramic precursor material to form the electrostatic chuck and an interface layer between the device and ceramic material formed during the step of sintering.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING BVNLALMERE

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Inventor(s)

Inventor Name Address
GAO HONG MASSACHUSETTS MASSACHUSETTS
AGUILAR SANTILLAN JOAQUIN GILBERT AZ
KUTTATH SHANKER AUSTIN TX

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