Method for Manufacturing Microelectronic Devices and Devices According to Such Methods

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United States of America Patent

APP PUB NO 20110163399A1
SERIAL NO

12955539

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Abstract

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A method is disclosed for manufacturing a sealed cavity in a microelectronic device, comprising forming a sacrificial layer at least at locations where the cavity is to be provided, depositing a membrane layer over the top of the sacrificial layer, patterning the membrane layer in at least two separate membrane layer blocks, removing the sacrificial layer through the membrane layer, and sealing the cavity by sealing the membrane layer, wherein patterning the membrane layer is performed after removal of the sacrificial layer.

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Patent Owner(s)

Patent OwnerAddress
IMECKAPELDREEF 75 LEUVEN 3001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Claes, Gert Kessel-lo, BE 7 22
Haspeslagh, Luc Lubbeek-Linden, BE 20 326
Witvrouw, Ann Herent, BE 20 196

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