TEMPERATURE MEASUREMENT SYSTEM COMPRISING A RESONANT MEMS DEVICE
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United States of America Patent
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Issued Date -
Sep 1, 2011
app pub date -
Feb 24, 2011
filing date -
Feb 26, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A micromechanical resonator device and a method for measuring a temperature are disclosed. In one aspect, the device has a resonator body, an excitation module, a control module, and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence. The micromechanical resonator device may have a passive temperature compensated resonance frequency.
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