TEMPERATURE MEASUREMENT SYSTEM COMPRISING A RESONANT MEMS DEVICE

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United States of America Patent

APP PUB NO 20110210801A1
SERIAL NO

13033932

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Abstract

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A micromechanical resonator device and a method for measuring a temperature are disclosed. In one aspect, the device has a resonator body, an excitation module, a control module, and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence. The micromechanical resonator device may have a passive temperature compensated resonance frequency.

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Patent Owner(s)

Patent OwnerAddress
IMECKAPELDREEF 75 LEUVEN 3001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jansen, Roelof Leuven, BE 6 11
Rottenberg, Xavier Schaarbeek, BE 30 93
Tilmans, Hendrikus Maasmechelen, BE 16 355

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