GAS ANALYZER AND GAS ANALYSIS METHOD
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United States of America Patent
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Oct 19, 2017
app pub date -
Mar 22, 2017
filing date -
Apr 14, 2016
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Abstract
A gas analyzer including: a chamber; a first gas sensor provided in the chamber and including a first gas sensitive member; a second gas sensor provided in the chamber and including a second gas sensitive member; and a detector that detects each of resistance changes of the first and the second gas sensitive members; wherein the first gas sensitive member is an oxide semiconductor mainly composed of at least one of Sn, W, Zn and In or a semiconductor mainly composed of C, and the second gas sensitive member is mainly composed of a halide or an oxide of Cu or Ag.
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