Electrostatic chuck which reduces arc discharge

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11018039
APP PUB NO 20190287839A1
SERIAL NO

16352899

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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According to the embodiment, the electrostatic chuck includes a ceramic dielectric substrate having a first major surface and a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface and being opposite to the gas introduction path. The ceramic dielectric substrate includes a first hole part positioned between the first major surface and the first porous part. At least one of the ceramic dielectric substrate or the first porous part includes a second hole part positioned between the first hole part and the first porous part, and a dimension of the second hole part is smaller than a dimension of the first porous part and larger than a dimension of the first hole part.

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Patent Owner(s)

  • TOTO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Itakura, Ikuo Kitakyushu, JP 10 124
Momiyama, Yutaka Kitakyushu, JP 41 32
Saigan, Shuichiro Kitakyushu, JP 20 42
Shiraishi, Jun Kitakyushu, JP 28 33
Yamaguchi, Kosuke Kitakyushu, JP 29 430

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