Detector for wavelength of excimer laser

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United States of America Patent

PATENT NO 5748316
SERIAL NO

08637657

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Abstract

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A low-pressure mercury lamp is used as a reference light source, and stable reference light is produced by using 253.7 nm line emitted by the lamp in which 49% or more of specific isotopic mercury is sealed.

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Patent Owner(s)

Patent OwnerAddress
KOMATSU LTD2-3-6 AKASAKA MINATO-KU TOKYO 1078414 ?1078414

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Yukio Isehara, JP 113 1519
Wakabayashi, Osamu Hiratsuka, JP 333 2876

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