Apparatus for transporting plate-shaped work piece
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United States of America Patent
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Sep 19, 2006
Grant Date -
Jan 6, 2005
app pub date -
Apr 13, 2004
filing date -
Apr 14, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing mechanism for sending air to the lower surface of the plate-shaped work piece via the dust-removal filter. In a first embodiment, a driving mechanism for contacting the plate-shaped work piece and moving it in the transporting direction is provided.
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