Method for improving the quality of an SiC crystal and an SiC semiconductor device

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United States of America Patent

PATENT NO 7737011
APP PUB NO 20080026544A1
SERIAL NO

11595232

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Abstract

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It is an object to provide a method for improving the quality of an SiC layer by effectively reducing or eliminating the carrier trapping centers by high temperature annealing and an SiC semiconductor device fabricated by the method.

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Patent Owner(s)

Patent OwnerAddress
CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY6-1 OTEMACHI 1-CHOME CHIYODA-KU TOKYO 100-8126

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Storasta, Liutauras Yokosuka, JP 10 75
Tsuchida, Hidekazu Yokosuka, JP 56 391

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