Thermal flow meter

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9658094
APP PUB NO 20150177043A1
SERIAL NO

14363002

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Abstract

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In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of the fluid under measurement in the sub-path; a temperature detection element that detects a temperature of the fluid under measurement; a drive circuit that controls a heating temperature of the sensor element; and a protection circuit that protects the drive circuit from noise, a cavity being formed on a substrate of the sensor element, an exothermic resistor being provided on a thin-film part on the cavity through the intermediary of an electrically insulating film, and a flow rate being detected on the basis of temperature distribution in the thin-film part.

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Patent Owner(s)

Patent OwnerAddress
HITACHI ASTEMO LTD2520 TAKABA HITACHINAKA-SHI IBARAKI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doi, Ryosuke Hitachinaka, JP 57 265
Hanzawa, Keiji Hitachinaka, JP 127 1124
Morino, Takeshi Hitachinaka, JP 77 459
Tashiro, Shinobu Hitachinaka, JP 66 290
Tokuyasu, Noboru Hitachinaka, JP 99 1223

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