PIEZORESISTOR HEIGHT SENSING CANTILEVER

World Intellectual Property Organization Patent

APP PUB NO WO-2009140441-A2
SERIAL NO

PCTUS2009043865

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A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.

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