AN ULTRASONIC TRANSDUCER WITH A NON-UNIFORM MEMBRANE

World Intellectual Property Organization Patent

APP PUB NO WO-2017196680-A1
SERIAL NO

PCTUS2017031426

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Abstract

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A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device includes a substrate, an edge support structure connected to the substrate, and a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane having non-uniform stiffness. The membrane includes a piezoelectric layer, a first electrode and a second electrode coupled to opposing sides of the piezoelectric layer, and a mechanical support layer coupled to one of the first electrode and the second electrode.

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Patent Owner(s)

Patent OwnerAddress
INVENSENSE INCUSSUNNYVALE CALIFORNIA 94089

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Inventor(s)

Inventor Name Address
BERGER RENATA MELAMUD PALO ALTO CA
NG ELDWIN SINGAPORE 468744

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