AR DIFFRACTIVE WAVEGUIDE MASS-PRODUCTION METHOD AND DEVICE
World Intellectual Property Organization Patent
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Abstract
An AR diffractive waveguide mass-production method and device, capable of achieving low-cost mass production of an AR diffractive waveguide having a large-area slanted surface-relief grating in any shape. A large-area slanted grating master can be manufactured in any shape by means of two-photon polymerization micro-nano 3D printing, thus solving the problem of manufacturing slanted grating masters in any shape, allowing large-size wafer-level masters to be directly manufactured, and reducing manufacturing costs and improving production efficiency. Composite nanoimprint lithography is used in combination with imprinting techniques specifically suited to slanted-grating imprinting and composite soft molds, solving the problem in which slanted gratings having large slant angles and great slot depths cannot be released from molds and thus cannot be manufactured. The invention enables slanted gratings to be manufactured in any geometric shape and size.
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Cited Art Landscape
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