PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATION DEGRADATION

World Intellectual Property Organization Patent

APP PUB NO WO-2022046823-A1
SERIAL NO

PCTUS2021047423

Stats

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An optical system includes a bulk material including a fluorine (F)-containing optical material. The bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation. The environment includes at least one type of gas or vapor. The at least one type of gas or vapor includes polar molecules.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
KLA CORPUSONE TECHNOLOGY DRIVE MILPITAS CALIFORNIA 95035 US

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address
CHEN GRACE LIBERTYVILLE IL
DERSTINE MATTHEW LOS GATOS CA
DELGADO GILDARDO 5945 LINWOOD CMN LIVERMORE CALIFORNIA 4550 4550
SAVEE JOHN SAN FRANCISCO 94131
BUTAEVA EVGENIIA 185 ESTANCIA DRIVE APT 329 SAN JOSE CALIFORNIA 95134 95134
ZHUANG GUORONG 2782 BARCLAY WAY ANN ARBOR MICHIGAN 48105 48105
LOPEZ LOPEZ GARY C/O NOVA MEASURING INSTRUMENTS INC 3342 GATEWAY BLVD FREMONT CALIFORNIA 94538 94538

Cited Art Landscape

Load Citation