Description
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES (piezo-electric, electrostrictive or magnetostrictive elements per se H01L 41/00)
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES (piezo-electric, electrostrictive or magnetostrictive elements per se H01L 41/00)
| Subclass | Title | 
|---|---|
| 1/00 | Devices without movable or flexible elements, e.g. micro-capillary devices | 
| 3/00 | Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence) | 
| 5/00 | Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements | 
| 7/00 | Micro-structural systems | 
| 7/02 | Micro-structural systems containing distinct electrical or optical devices of particular relevance for their function, e.g. micro-electro-mechanical systems (MEMS) (B81B 7/04 takes precedence) | 
| 7/04 | Micro-structural systems Networks or arrays of similar micro-structural devices | 
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