B81B

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Description

MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES (piezo-electric, electrostrictive or magnetostrictive elements per se H01L 41/00)

Subclasses

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Subclass Title
1/00 Devices without movable or flexible elements, e.g. micro-capillary devices
3/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence)
5/00 Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
7/00 Micro-structural systems
7/02 Micro-structural systems containing distinct electrical or optical devices of particular relevance for their function, e.g. micro-electro-mechanical systems (MEMS) (B81B 7/04 takes precedence)

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Patents Issued To Date - By Filing Year

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