G01Q

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Description

SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]

Subclasses

SubclassTitle
10/00 Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
10/02 Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Coarse scanning or positioning
10/04 Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Fine scanning or positioning
10/06 Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Fine scanning or positioning Circuits or algorithms therefor
20/00 Monitoring the movement or position of the probe
20/02 Monitoring the movement or position of the probe by optical means
20/04 Monitoring the movement or position of the probe Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezo-electric gauge
30/00 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
30/02 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
30/04 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Display or data processing devices
30/06 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Display or data processing devices for error compensation
30/08 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber
30/10 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Thermal environment
30/12 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Fluid environment
30/14 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Fluid environment Liquid environment
30/16 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Vacuum environment
30/18 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields
30/20 Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Sample handling devices or methods
40/00 Calibration, e.g. of probes
40/02 Calibration, e.g. of probes Calibration standards or methods of fabrication thereof

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