B81B 3/00

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Class  B81B : MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES


Subclass 3/00: Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence)

Recent Patents

Patent #TitleFiling DateIssue DatePatent Owner
10609491 Speaker and MEMs actuator thereofMar 11, 19Mar 31, 20Merry Electronics(Shenzhen) Co., Ltd.
10604405 Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxyApr 06, 17Mar 31, 20INFINEON TECHNOLOGIES DRESDEN GMBH
10608557 Four degrees of freedom piston-tube electrostatic actuatorDec 21, 18Mar 31, 20Not available
10598689 Out-of plane-accelerometerDec 11, 17Mar 24, 20SAFRAN COLIBRYS SA
10597288 MEMS-device manufacturing method, MEMS device, and MEMS moduleMay 25, 18Mar 24, 20ROHM CO., LTD.
10599034 Method for manufacturing MEMS devices and nano devices with varying degrees of hydrophobicity and hydrophilicity in a composite photoimageable dry filmAug 21, 17Mar 24, 20Funai Electric Co., Ltd.
10598632 Layered structure and method for fabricating sameNov 14, 19Mar 24, 20The University of British Columbia
10600600 Electromechanical power switch integrated circuits and devices and methods thereofOct 16, 17Mar 24, 20INOSO, LLC
10596581 Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatusJan 07, 19Mar 24, 20Ricoh Company, Ltd.
10602290 MEMS deviceNov 26, 18Mar 24, 20Infineon Technologies AG
10593456 Levitated motor-actuator with parallel dipole line trap systemOct 16, 17Mar 17, 20International Business Machine Corporation
10589983 Silicon carbide microelectromechanical structure, device, and methodSep 07, 17Mar 17, 20The Government of the United States of America, as represented by the Secretary of the Navy
10589984 MEMS devices and processesMar 19, 18Mar 17, 20Cirrus Logic, Inc.
10589981 Semiconductor pressure sensorMay 08, 18Mar 17, 20Mitsubishi Electric Corporation
10589985 Actuator deviceDec 22, 16Mar 17, 20Hamamatsu Photonics K.K.
10589992 Micro-electro-mechanical system (MEMS) structures and design structuresMar 16, 18Mar 17, 20IBM Corporation
10589987 System and method for a MEMS transducerNov 06, 13Mar 17, 20Infineon Technologies AG
10589991 Micro-electro-mechanical system (MEMS) structures and design structuresFeb 12, 18Mar 17, 20IBM Corporation
10589989 Absolute and differential pressure sensors and related methodsOct 12, 17Mar 17, 20Semiconductor Components Industries, LLC
10589982 Sensor package having a movable sensorJun 21, 19Mar 17, 20PixArt Imaging Inc.

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Recent Publications

Publication #TitleFiling DatePub DatePatent Owner
2020/0102,209 SIDEWALL STOPPER FOR MEMS DEVICEApr 24, 19Apr 02, 20Not available
2020/0102,211 MICROELECTRONIC SENSOR DEVICE WITH AN OUT-OF-PLANE DETECTION HAVING A CONTROLLED CROSS SENSITIVITYOct 01, 19Apr 02, 20Commissariat A L' Energie Atomique Et Aux Energies Alternatives
2020/0103,290 MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) THERMAL SENSORMay 10, 19Apr 02, 20Taiwan Semiconductor Manufacturing Co., Ltd.
2020/0102,210 METHOD FOR CALIBRATING A SENSOR SYSTEMSep 25, 19Apr 02, 20Not available
2020/0095,115 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAMENov 27, 19Mar 26, 20Not available
2020/0095,527 MICROCHANNEL DEVICENov 25, 19Mar 26, 20Not available
2020/0095,114 High-Range Semiconductor Load Sensor DeviceSep 04, 19Mar 26, 20Not available
2020/0087,138 MEMS Transducer for Interacting with a Volume Flow of a Fluid, and Method of Producing SameOct 21, 19Mar 19, 20Not available
2020/0079,643 SYSTEMS AND METHODS FOR FABRICATING 3D SOFT MICROSTRUCTURESMar 14, 18Mar 12, 20President and Fellows of Harvard College
2020/0079,642 MICROELECTROMECHANICAL SYSTEMS (MEMS) STRUCTURE TO PREVENT STICTION AFTER A WET CLEANING PROCESSNov 13, 19Mar 12, 20Not available
2020/0071,157 MEMS DEVICE AND METHOD FOR FORMING THE SAMEAug 29, 18Mar 05, 20Not available
2020/0071,156 DRIVE COMPONENT OF A MICRO-NEEDLE SYSTEM AND METHOD FOR DRIVING THE SAME, MICRO-NEEDLE SYSTEM AND METHOD FOR FABRICATING THE SAMEMay 16, 19Mar 05, 20Boe Technology Group Co., Ltd
2020/0062,583 TECHNIQUES FOR TRANSDUCTION AND STORAGE OF QUANTUM LEVEL SIGNALSMar 05, 19Feb 27, 20California Institute of Technology
2020/0055,726 MEMS DEVICEApr 12, 18Feb 20, 20Cirrus Logic International Semiconductor Ltd.
2020/0055,725 METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYSMay 01, 18Feb 20, 20Not available
2020/0048,082 THIN FILM MATERIAL TRANSFER METHODMar 21, 18Feb 13, 20The University of Manchester
2020/0048,072 MICROMECHANICAL SENSOR THAT INCLUDES A STRESS DECOUPLING STRUCTURESep 25, 17Feb 13, 20Not available
2020/0039,814 PHYSICAL QUANTITY SENSOR, SENSOR DEVICE, ELECTRONIC DEVICE, AND VEHICLEAug 05, 19Feb 06, 20Not available
2020/0039,813 MEMS DEVICEMar 13, 19Feb 06, 20KABUSHIKI KAISHA TOSHIBA
2020/0039,812 A MICROFLUIDIC ANALYTICAL PLATFORM FOR AUTONOMOUS IMMUNOASSAYSOct 06, 17Feb 06, 20Not available

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