B81B 3/00

Sub-Class

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Description

Class  B81B : MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES


Subclass 3/00: Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence)

Recent Patents

Patent #TitleFiling DateIssue DatePatent Owner
11965787 Sealed force sensor with etch stop layerJul 08, 22Apr 23, 24NEXTINPUT, INC.
11964866 MEMS device having uniform contactsApr 13, 23Apr 23, 24Qorvo US, Inc.
11968497 MEMS chipMay 09, 22Apr 23, 24AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
11968902 Piezoelectric body and MEMS device using sameNov 26, 19Apr 23, 24Japan as represented by Director General of National Institute of Advanced Industrial Science and Technology Ministry of Economy Trade and Industry
11959806 MEMS sensors and systemsApr 10, 23Apr 16, 24OBSIDIAN SENSORS, INC.
11961722 Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor depositionDec 04, 22Apr 16, 24SPTS TECHNOLOGIES LIMITED
11963452 Method of making piezoelectric microphone with deflection controlNov 24, 20Apr 16, 24VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
11944412 Blood pressure detection deviceJun 02, 21Apr 02, 24Microjet Technology Co. Ltd.
11946741 Mems sensor for sensing deformation by breaking contact between two electrodesMay 07, 20Apr 02, 24SILMACH
11946822 Semiconductor transducer device with multilayer diaphragm and method of manufacturing a semiconductor transducer device with multilayer diaphragmOct 16, 19Apr 02, 24Sciosense B.V.
11945712 Process for manufacturing a micro-electro-mechanical device, and MEMS deviceMay 14, 21Apr 02, 24SMI STMicroelectronics S.r.l
11945713 Systems and methods for providing getters in microelectromechanical systemsJul 08, 19Apr 02, 24Invensense, Inc.
11944998 Capacitive micromachined ultrasonic transducer and method of fabricating the sameMar 18, 20Apr 02, 24Korea Institute of Science and Technology
11950053 MEMS chipMay 09, 22Apr 02, 24AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
11940345 Micromechanical component for a capacitive pressure sensor deviceDec 19, 19Mar 26, 24502 Robert Bosch GmbH
11940346 Micromechanical pressure sensor device and a corresponding production methodDec 13, 19Mar 26, 24502 Robert Bosch GmbH
11940618 Micromechanical component and method for producing a micromechanical componentAug 20, 19Mar 26, 24502 Robert Bosch GmbH
11939211 Actuator deviceApr 28, 23Mar 26, 24Hamamatsu Photonics K. K.
11939215 Microelectromechanical structure including a functional element situated in a cavity of the microelectromechanical structureOct 04, 19Mar 26, 24502 Robert Bosch GmbH
11938726 Droplet jetting deviceSep 21, 21Mar 26, 24CANON KABUSHIKI KAISHA

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Recent Publications

Publication #TitleFiling DatePub DatePatent Owner
2024/0126,070 OPTICAL DEVICEDec 28, 23Apr 18, 24Hamamatsu Photonics K.K.
2024/0124,299 PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE INCLUDING TWO CHAMBERS AT DIFFERENT PRESSURES AND RELATED MICRO-ELECTRO-MECHANICAL DEVICEOct 12, 23Apr 18, 24SMI STMicroelectronics S.r.l
2024/0130,240 MICRO ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOFDec 11, 23Apr 18, 24SMI STMicroelectronics S.r.l
2024/0116,749 METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM DEVICEDec 13, 23Apr 11, 24Vanguard International Semiconductor Corporation
2024/0118,533 OPTO-MECHANICAL STRUCTURE AND ASSOCIATED MANUFACTURING METHODSOct 05, 23Apr 11, 24Not available
2024/0121,545 TRUE WIRELESS DEVICE AND DUAL-MODE TRUE WIRELESS DEVICEDec 09, 22Apr 11, 24Not available
2024/0121,559 CYLINDRICAL MEMS STRUCTURES FOR AUDIO COMPONENTSAug 28, 23Apr 11, 24Not available
2024/0109,770 Spring Supported and Sealed MEMS Diaphragm AssemblySep 30, 22Apr 04, 24Not available
2024/0109,771 METHODS FOR SEALING CAVITIES IN MICRO-FABRICATED DEVICES AND MICRO-FABRICATED DEVICES FABRICATED IN ACCORDANCE WITH SAMESep 27, 23Apr 04, 24Not available
2024/0110,779 MIRROR UNIT AND OPTICAL MODULEDec 11, 23Apr 04, 24Hamamatsu Photonics K.K.
2024/0114,292 Triple-Membrane MEMS DeviceDec 07, 23Apr 04, 24Not available
2024/0100,565 CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODSNov 30, 23Mar 28, 24Not available
2024/0100,566 ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TRANSDUCER DEVICESDec 06, 23Mar 28, 24BFLY OPERATIONS, INC.
2024/0101,410 MEMS OPTICAL MICROPHONESep 26, 22Mar 28, 24Not available
2024/0101,411 MEMS OPTICAL MICROPHONESep 26, 22Mar 28, 24Not available
2024/0101,412 Support Device for One or More MEMS ComponentsSep 05, 23Mar 28, 24Not available
2024/0106,357 Vibration-Driven Energy Harvesting Element and Method for Manufacturing the SameOct 13, 21Mar 28, 24Not available
2024/0107,239 MEMS OPTICAL MICROPHONESep 26, 22Mar 28, 24Not available
2024/0092,629 INTEGRATED MEMS ELECTROSTATIC MICRO-SPEAKER DEVICE AND METHODJun 13, 22Mar 21, 24Not available
2024/0092,630 CAPACITIVE SENSORJan 17, 22Mar 21, 24Not available

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Patents Issued To Date - By Filing Year

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