Description
Class C23F : NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES
Subclass 1/08: Etching metallic material by chemical means Apparatus, e.g. for photomechanical printing surfaces
C23F 1/08
Sub-Class
Stats
- 174 US PATENTS IN FORCE
- 36 US APPLICATIONS PENDING
- 93 Total Patent Owners
- 2,368 TOTAL INVENTORS
Recent Patents
| Patent # | Title | Filing Date | Issue Date | Patent Owner |
|---|---|---|---|---|
| 12264396 | Substrate processing method | Nov 22, 23 | Apr 01, 25 | Tokyo Electron Limited |
| 12215417 | Substrate processing method and substrate processing device | Mar 22, 22 | Feb 04, 25 | Tokyo Electron Limited |
| 12194490 | Automotive part identification marking system | Oct 24, 23 | Jan 14, 25 | Catmark Manufacturing, LLC |
| 11993854 | Chamber wall polymer protection system and method | Feb 24, 22 | May 28, 24 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 11986853 | Substrate processing apparatus, film formation unit, substrate processing method and film formation method | Nov 06, 20 | May 21, 24 | SCREEN Holdings Co., Ltd. |
| 11923170 | Plasma processing apparatus and plasma processing method | Nov 26, 19 | Mar 05, 24 | Tokyo Electron Limited |
| 11905603 | Substrate processing method and substrate processing apparatus | Dec 17, 21 | Feb 20, 24 | Tokyo Electron Limited |
| 11869770 | Selective deposition of etch-stop layer for enhanced patterning | Jul 29, 21 | Jan 09, 24 | Lam Research Corporation |
| 11826775 | Automotive part identification marking system | Mar 06, 23 | Nov 28, 23 | CatMarks Manufacturing, LLC |
| 11810797 | Wetting processing apparatus and operation method thereof | Dec 20, 19 | Nov 07, 23 | PYXIS CF PTE. LTD. |
| 11708637 | Methods of supporting a graphene sheet disposed on a frame support | Aug 06, 20 | Jul 25, 23 | The Regents of the University of California |
| 11710630 | Plasma block with integrated cooling | Apr 23, 20 | Jul 25, 23 | Applied Materials Inc. |
| 11306399 | Nanoparticle compositions | Aug 12, 20 | Apr 19, 22 | January Therapeutics, Inc. |
| 11142830 | Method of surface micro-texturing with a subtractive agent | Feb 08, 19 | Oct 12, 21 | The Boeing Company |
| 11136673 | Method of surface micro-texturing with a subtractive agent | Feb 08, 19 | Oct 05, 21 | The Boeing Company |
| 11099131 | Systems and methods for copper etch rate monitoring and control | Dec 06, 17 | Aug 24, 21 | University of North Texas |
| 11094542 | Selective deposition of etch-stop layer for enhanced patterning | Jan 15, 20 | Aug 17, 21 | Lam Research Corporation |
| 10998187 | Selective deposition with atomic layer etch reset | Dec 13, 19 | May 04, 21 | Lam Research Corporation |
| 10995409 | Method and apparatus for transfer of two-dimensional materials | May 21, 19 | May 04, 21 | ETX Corporation |
| 10957471 | Calibration system and calibrating method | Dec 26, 18 | Mar 23, 21 | Tyco Electronics (Shanghai) Co. Ltd.; TE Connectivity Corporation; Kunshan League Automechanism Co., Ltd.; |
Recent Publications
| Publication # | Title | Filing Date | Pub Date | Patent Owner |
|---|---|---|---|---|
| 2025/0034,719 | APPARATUS AND METHOD OF TREATING SUBSTRATE | Jun 26, 24 | Jan 30, 25 | SEMES CO., LTD. |
| 2025/0019,835 | ETCHING DEVICE AND ETCHING SYSTEM | Aug 26, 24 | Jan 16, 25 | Cloeren Technology GmbH; Steinbeis Transfer GmbH; |
| 2025/0006,535 | SUBSTRATE PROCESSING SYSTEM | Jun 26, 24 | Jan 02, 25 | Not available |
| 2025/0006,536 | SUBSTRATE TREATMENT SYSTEM | Jun 26, 24 | Jan 02, 25 | Not available |
| 2024/0410,057 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | Mar 25, 24 | Dec 12, 24 | SEMES CO., LTD.; Research & Business Foundation SUNGKYUNKWAN UNIVERSITY; |
| 2024/0309,515 | ETCHING DEVICE | May 29, 24 | Sep 19, 24 | Not available |
| 2024/0271,286 | CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD | Apr 26, 24 | Aug 15, 24 | Not available |
| 2024/0253,079 | SUBSTRATE PROCESSING METHOD | Apr 12, 24 | Aug 01, 24 | Not available |
| 2024/0124,984 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE | Oct 10, 23 | Apr 18, 24 | Not available |
| 2024/0035,168 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | Jul 19, 23 | Feb 01, 24 | Not available |
| 2023/0366,100 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | Apr 11, 23 | Nov 16, 23 | Not available |
| 2023/0203,669 | SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD | Dec 22, 22 | Jun 29, 23 | Not available |
| 2023/0160,071 | PROCESS CONTROL SYSTEM AND OPERATING METHOD THEREFOR | Feb 18, 21 | May 25, 23 | POSCO |
| 2022/0356,584 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | May 03, 22 | Nov 10, 22 | Not available |
| 2022/0117,092 | CONTINUOUS ETCHING SYSTEM | Jul 29, 19 | Apr 14, 22 | Not available |
| 2020/0016,623 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM | Jul 08, 19 | Jan 16, 20 | Not available |
| 2019/0330,748 | Gas distribution hub for plasma processing chamber | Jul 08, 19 | Oct 31, 19 | Not available |
| 2019/0152,211 | TRANSFERRING GRAPHITIC THIN FILMS WITH A LIQUID GALLIUM PROBE | Nov 20, 18 | May 23, 19 | Not available |
| 2019/0085,467 | Plasma Reactor Having Radial Struts for Substrate Support | Nov 19, 18 | Mar 21, 19 | Not available |
| 2018/0265,989 | SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD | Sep 11, 17 | Sep 20, 18 | TOSHIBA MEMORY CORPORATION |
Top Owners in This Subclass
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Patents Issued To Date - By Filing Year
Average Time to Issuance
- 33 Months (last 2 years Issuances)
- 33 Months (last 5 years Issuances)