C23F 1/24

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1 US PATENTS IN FORCE
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1 Total Patent Owners
36 TOTAL INVENTORS

Description

Class C23F : NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES

Subclass 1/24: Etching metallic material by chemical means Etching compositions (C23F 1/44 takes precedence) Aqueous compositions Acidic compositions (C23F 1/42 takes precedence) for etching silicon or germanium

Recent Patents

Patent #	Title	Filing Date	Issue Date	Patent Owner
6558559	Method of manufacturing micromechanical surface structures by vapor-phase etching	Feb 05, 98	May 06, 03	ROBERT BOSCH GMBH

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Average Time to Issuance

39 Months (last 2 years Issuances)
39 Months (last 5 years Issuances)

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