Class C23F : NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES
Subclass 1/34: Etching metallic material by chemical means Etching compositions (C23F 1/44 takes precedence) Aqueous compositions Alkaline compositions (C23F 1/42 takes precedence) for etching copper or alloys thereof
| Patent # | Title | Filing Date | Issue Date | Patent Owner |
|---|---|---|---|---|
| 12146070 | Eco-friendly hydrophobic or ultrahydrophobic coating method | Jan 29, 21 | Nov 19, 24 | POSTECH Research and Business Development Foundation |
| 11938536 | Nanotextured metal powders for 3D printing of metals | Mar 28, 22 | Mar 26, 24 | The Board of Trustees of the Leland Stanford Junior University |
| 11866831 | Methods for wet atomic layer etching of copper | Apr 20, 22 | Jan 09, 24 | Tokyo Electron Limited |
| 11859119 | Chemical liquid and method for treating object to be treated | Sep 17, 21 | Jan 02, 24 | FUJIFILM Corporation |
| 11674229 | Etching chelating agent, manufacturing method thereof, and etching solution composition | May 07, 20 | Jun 13, 23 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. |
| 11512406 | Method of enhancing copper electroplating | Sep 21, 20 | Nov 29, 22 | Rohm and Haas Electronic Materials LLC |
| 11346008 | Ruthenium etching composition and method | Nov 22, 19 | May 31, 22 | Entegris Inc. |
| 11225722 | Alkaline cupric chloride etchant for printed circuit board | Aug 04, 17 | Jan 18, 22 | Not available |
| 10961629 | Superhydrophobic surface arrangement, article compromising same and method of manufacture thereof | Dec 27, 18 | Mar 30, 21 | CITY UNIVERSITY OF HONG KONG |
| 10297465 | Selective metal/metal oxide etch process | Jan 13, 15 | May 21, 19 | Sachem Inc. |
| 10246335 | Methods of modifying surfaces of diamond particles, and related diamond particles and earth-boring tools | May 27, 16 | Apr 02, 19 | Baker Hughes, a GE company, LLC |
| 10211232 | Manufacture method of array substrate and array substrate manufactured by the method | Apr 08, 16 | Feb 19, 19 | Shenzhen China Star Optoelectronics Technology Co. Ltd. |
| 10155921 | Removal composition for selectively removing hard mask and methods thereof | Oct 09, 14 | Dec 18, 18 | E I DUPONT NE NEMOURS AND COMPANY; EKC Technology, Inc.; |
| 10087368 | High-efficiency high-quality and safe alkaline cupric chloride etchant for printed circuit board | May 26, 15 | Oct 02, 18 | Not available |
| 10005991 | Removal composition for selectively removing hard mask and methods thereof | Oct 09, 14 | Jun 26, 18 | EKC Technology, Inc.; E I du Pont de Nemours and Company; |
| 9932678 | Microetching solution for copper, replenishment solution therefor and method for production of wiring board | Aug 01, 16 | Apr 03, 18 | Mec Company Ltd. |
| 9797048 | Stripping solution for zinc/nickel alloy plating from metal substrate | Mar 31, 15 | Oct 24, 17 | THE BOEING COMPANY |
| 9790600 | Etching agent for copper or copper alloy | Nov 02, 15 | Oct 17, 17 | ENTEGRIS, INC. |
| 9580818 | Etching liquid for film of multilayer structure containing copper layer and molybdenum layer | May 27, 11 | Feb 28, 17 | MITSUBISHI GAS CHEMICAL COMPANY, INC. |
| 9528188 | Method of improving lifetime of etching liquid and yield in Cu-interconnection process and Cu-interconnection etching device | Feb 09, 15 | Dec 27, 16 | SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. |
| Publication # | Title | Filing Date | Pub Date | Patent Owner |
|---|---|---|---|---|
| 2024/0376,606 | ETCHING COMPOSITIONS | Jul 22, 24 | Nov 14, 24 | Texas Instruments Incorporated |
| 2023/0243,041 | ETCHING COMPOSITIONS | Jan 28, 22 | Aug 03, 23 | Not available |
| 2023/0220,558 | AN AQUEOUS BASIC ETCHING COMPOSITION FOR THE TREATMENT OF SURFACES OF METAL SUBSTRATES | Jun 10, 21 | Jul 13, 23 | Not available |
| 2022/0117,092 | CONTINUOUS ETCHING SYSTEM | Jul 29, 19 | Apr 14, 22 | Not available |
| 2017/0037,519 | METHOD OF IMPROVING LIFETIME OF ETCHING LIQUID AND YIELD IN CU-INTERCONNECTION PROCESS AND CU-INTERCONNECTION ETCHING DEVICE | Oct 19, 16 | Feb 09, 17 | SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. |
| Upgrade to the Professional Level to view Top Owners for this Subclass.Learn More |
|---|
