Description
Class F23D : BURNERS
Subclass 3/12: Burners using capillary action Wick burners Blue-flame burners with flame spreaders
Class F23D : BURNERS
Subclass 3/12: Burners using capillary action Wick burners Blue-flame burners with flame spreaders
Patent # | Title | Filing Date | Issue Date | Patent Owner |
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11996309 | Wafer boat handling device, vertical batch furnace and method | May 14, 20 | May 28, 24 | ASM IP Holding B.V. |
5586880 | Heat treatment apparatus and heat treatment boat | May 30, 95 | Dec 24, 96 | TOKYO ELECTRON LIMITED |
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