Class G01Q : SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
Subclass 10/02: Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Coarse scanning or positioning
| Patent # | Title | Filing Date | Issue Date | Patent Owner |
|---|---|---|---|---|
| 11656245 | Method and device for measuring dimension of semiconductor structure | Aug 03, 21 | May 23, 23 | Changxin Memory Technologies, Inc. |
| 11499989 | Surface analysis device | Oct 11, 19 | Nov 15, 22 | Shimadzu Corporation |
| 11474127 | Modular scanning probe microscope head | May 06, 21 | Oct 18, 22 | Board of Trustees Rutgers The State University of New Jersey |
| 11099210 | Feedback correction in sub-resonant tapping mode of an atomic force microscope | Jan 30, 18 | Aug 24, 21 | Trustees of Tufts College |
| 10908179 | Device and method for measuring and/or modifying surface features on a surface of a sample | Aug 18, 16 | Feb 02, 21 | NEDERLANDSK ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
| 10884022 | Scanner and scanning probe microscope | Dec 07, 17 | Jan 05, 21 | Osaka University |
| 10649003 | Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes | May 31, 18 | May 12, 20 | 501 Board of Regents The University of Texas System |
| 10161958 | Three-dimensional fine movement device | Jul 09, 15 | Dec 25, 18 | Hitachi High-Tech Science Corporation |
| 10151773 | Scanning probe microscope and probe contact detection method | Mar 24, 17 | Dec 11, 18 | HITACHI HIGH-TECH SCIENCE CORPORATION |
| 9995763 | Precise probe placement in automated scanning probe microscopy systems | Feb 24, 15 | Jun 12, 18 | Bruker Nano, Inc. |
| 9841436 | AM/FM measurements using multiple frequency of atomic force microscopy | Sep 26, 16 | Dec 12, 17 | OXFORD INSTRUMENTS ASYLUM RESEARCH, INC |
| 9709598 | Scanning ion conductance microscopy using surface roughness for probe movement | May 27, 16 | Jul 18, 17 | IMPERIAL INNOVATIONS LIMITED |
| 9506947 | System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing | Nov 24, 14 | Nov 29, 16 | DCG SYSTEMS, INC. |
| 9052340 | Probe assembly for a scanning probe microscope | Mar 29, 11 | Jun 09, 15 | INFINITESIMA LIMITED |
| 8402561 | MEMS actuator device with integrated temperature sensors | Oct 15, 09 | Mar 19, 13 | ADHAWK MICROSYSTEMS INC. |
| 8397311 | Metrology probe and method of configuring a metrology probe | May 28, 10 | Mar 12, 13 | THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK |
| Publication # | Title | Filing Date | Pub Date | Patent Owner |
|---|---|---|---|---|
| 2024/0110,939 | AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME | Feb 09, 22 | Apr 04, 24 | Not available |
| 2022/0299,544 | ATOMIC NANO-POSITIONING DEVICE | Aug 31, 20 | Sep 22, 22 | NATIONAL RESEARCH COUNCIL OF CANADA; The Governors of the University of Alberta; |
| 2020/0049,733 | SCANNER AND SCANNING PROBE MICROSCOPE | Dec 07, 17 | Feb 13, 20 | Osaka University |
| 2018/0348,254 | COUPLED MULTISCALE POSITIONING OF ARRAYS OF PARALLEL, INDEPENDENTLY ACTUATED AND SIMULTANEOUSLY DRIVEN MODULAR SCANNING PROBE MICROSCOPES FOR HIGH-THROUGHPUT, IN-LINE, NANOSCALE MEASUREMENT OF FLEXIBLE, LARGE AREA, AND ROLL-TO-ROLL PROCESSES | May 31, 18 | Dec 06, 18 | Not available |
| 2018/0074,092 | INFORMATION ACQUIRING METHOD IN ATOMIC FORCE MICROSCOPE | Nov 15, 17 | Mar 15, 18 | OLYMPUS CORPORATION |
| 2017/0254,834 | Modular Atomic Force Microscope | Mar 22, 17 | Sep 07, 17 | Not available |
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