Description
Class H05H : PLASMA TECHNIQUE
Subclass 1/00: Generating plasma; Handling plasma (application of plasma technique in thermonuclear fusion reactors G21B 1/00)
H05H 1/00
Sub-Class
Stats
- 679 US PATENTS IN FORCE
- 19 US APPLICATIONS PENDING
- 313 Total Patent Owners
- 3,391 TOTAL INVENTORS
Recent Patents
| Patent # | Title | Filing Date | Issue Date | Patent Owner |
|---|---|---|---|---|
| 11972931 | Light emitting sealed body, light emitting unit, and light source device | Dec 21, 20 | Apr 30, 24 | Hamamatsu Photonics K.K.; ENERGETIQ TECHNOLOGY, INC.; |
| 11961720 | Device for detecting plasma of ultra fast with multi channel | Oct 12, 21 | Apr 16, 24 | T.O.S Co., Ltd. |
| 11948774 | Glow plasma gas measurement signal processing | Apr 06, 21 | Apr 02, 24 | Servomex Group Limited |
| 11924956 | Systems and methods for Thomson scattering background interference suppression | Jun 22, 21 | Mar 05, 24 | The Texas A&M University System |
| 11865572 | Depositing of material by spraying precursor using supercritical fluid | Mar 04, 21 | Jan 09, 24 | Nova Engineering Films, Inc. |
| 11856682 | Method for measuring plasma ion nonextensive parameter | Feb 08, 23 | Dec 26, 23 | Nanchang University |
| 11849531 | Underwater plasma generating apparatus | May 16, 18 | Dec 19, 23 | K FUSION TECHNOLOGY INC. |
| 11810679 | Mitigating plasma instability | Nov 22, 22 | Nov 07, 23 | X Development LLC |
| 11800627 | Probe for measuring plasma parameters | Jun 25, 19 | Oct 24, 23 | RUHR-UNIVERSITÄT BOCHUM |
| 11764034 | Plasma processing method and plasma processing apparatus | May 19, 20 | Sep 19, 23 | Tokyo Electron Limited |
| 11515050 | Mitigating plasma instability | Nov 12, 20 | Nov 29, 22 | X Development LLC |
| 11464558 | Plasma accessory | Aug 26, 19 | Oct 11, 22 | U.S. Patent Innovations LLC |
| 11371960 | Microscale gas breakdown device and process | Jul 26, 19 | Jun 28, 22 | Board of Trustees of Michigan State University |
| 11355325 | Methods and systems for monitoring input power for process control in semiconductor process systems | Dec 17, 20 | Jun 07, 22 | APPLIED MATERIALS, INC. |
| 11324104 | Magnetic probe device | Jul 19, 19 | May 03, 22 | Dalian University of Technology |
| 11295959 | Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus | Feb 07, 20 | Apr 05, 22 | Kokusai Electric Corporation |
| 11259396 | Plasma generation system | Apr 04, 17 | Feb 22, 22 | FUJI CORPORATION |
| 11153960 | Plasma-based electro-optical sensing and methods | Jun 10, 19 | Oct 19, 21 | Innoveering, LLC |
| 11129268 | Ignition apparatus including spark plug that generates plasma | Mar 07, 18 | Sep 21, 21 | DENSO Corporation; PLASMA APPLICATIONS CO., LTD.; |
| 11049754 | Method for controlling semiconductor process | Jul 10, 18 | Jun 29, 21 | Samsung Electronics Co., Ltd. |
Recent Publications
| Publication # | Title | Filing Date | Pub Date | Patent Owner |
|---|---|---|---|---|
| 2024/0116,074 | DEPOSITING OF MATERIAL BY SPRAYING PRECURSOR USING SUPERCRITICAL FLUID | Dec 04, 23 | Apr 11, 24 | Not available |
| 2024/0098,855 | LOCALIZED HEATING DEVICE AND LOCALIZED HEATING SYSTEM HAVING THE SAME | Dec 07, 22 | Mar 21, 24 | Not available |
| 2024/0098,866 | MICROWAVE PLASMA TREATMENT DEVICE | Jan 25, 22 | Mar 21, 24 | Japan as represented by Director General of National Institute of Advanced Industrial Science and Technology Ministry of Economy Trade and Industry |
| 2024/0090,111 | MULTIPLE PLASMA ION SOURCE FOR INLINE SECONDARY ION MASS SPECTROMETRY | Sep 09, 22 | Mar 14, 24 | Not available |
| 2024/0074,024 | STEERED INDUCTIVELY COUPLED PLASMA | Aug 29, 22 | Feb 29, 24 | Not available |
| 2024/0038,512 | Measurement Apparatus for Alternating Currents and Voltages of Physical Plasmas, Particularly of Cold Plasmas at Atmospheric Pressure, and Plasma Generator Comprising Such a Measurement Apparatus | Jul 27, 23 | Feb 01, 24 | Not available |
| 2022/0386,441 | DEVICE FOR CONTAINING AND ACCELERATING PLASMA WITHIN A MIXER/COMPRESSOR SYSTEM BY WAY OF MAGNETIC FORCES AND THE COANDA EFFECT | May 31, 21 | Dec 01, 22 | Not available |
| 2022/0338,337 | Langmuir Probe Operating at Fixed Voltages | Apr 16, 21 | Oct 20, 22 | Not available |
| 2022/0308,464 | METHOD AND DEVICE FOR CLEANING SUBSTRATES | Jul 06, 21 | Sep 29, 22 | Not available |
| 2022/0110,206 | METHOD FOR MEASURING PLASMA ELECTRON NONEXTENSIVE PARAMETER | Dec 17, 21 | Apr 07, 22 | Not available |
| 2022/0061,146 | SYSTEM AND METHOD FOR PLASMA-SURFACE-TREATMENT OF CYLINDRIC AND ANNULAR WORKPIECES USING ATMOSPHERIC-PRESSURE PLASMA GENERATOR | Nov 04, 21 | Feb 24, 22 | Not available |
| 2021/0410,263 | Systems and Methods for Thomson Scattering Background Interference Suppression | Jun 22, 21 | Dec 30, 21 | The Texas A&M University System |
| 2021/0307,151 | Air Leak Detection In Plasma Processing Apparatus With Separation Grid | Jun 14, 21 | Sep 30, 21 | Not available |
| 2021/0289,612 | PLASMA MEASURING APPARATUS AND PLASMA MEASURING METHOD | Mar 04, 21 | Sep 16, 21 | Tokyo Electron Limited |
| 2020/0383,196 | METHOD AND SYSTEM FOR MEASURING PLASMA EMISSIONS IN A PLASMA PROCESSING REACTOR | Apr 13, 18 | Dec 03, 20 | Not available |
| 2020/0154,555 | FLOW FIELD VISUALIZATION DEVICE, FLOW FIELD OBSERVATION METHOD, AND PLASMA GENERATOR | Dec 17, 18 | May 14, 20 | Industrial Technology Research Institute |
| 2020/0092,976 | PLASMA POWER GENERATOR (Z-box and Z-tower) | May 11, 19 | Mar 19, 20 | Not available |
| 2020/0092,975 | NON-LINEAR OPTICAL SIMULATOR FOR COLLISIONAL PLASMAS | Sep 19, 18 | Mar 19, 20 | Not available |
| 2012/0199,554 | DECORATIVE SURFACE FINISH AND METHOD OF FORMING SAME | Apr 19, 12 | Aug 09, 12 | Not available |
Top Owners in This Subclass
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Patents Issued To Date - By Filing Year
Average Time to Issuance
- 31 Months (last 2 years Issuances)
- 31 Months (last 5 years Issuances)