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9997336 | Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP | Apr 26, 16 | Jun 12, 18 | Taiwan Semiconductor Manufacturing Co Ltd. |
9996008 | Photoresist pattern trimming methods | Aug 22, 16 | Jun 12, 18 | Rohm and Haas Electronic Materials LLC |
9997371 | Atomic layer etch methods and hardware for patterning applications | Apr 28, 17 | Jun 12, 18 | Lam Research Corporation |
9996004 | EUV photopatterning of vapor-deposited metal oxide-containing hardmasks | Nov 20, 15 | Jun 12, 18 | Lam Research Corporation |
9997636 | Fabricating method of optical sensing device | Aug 22, 17 | Jun 12, 18 | Au Optronics Corp. |
9996003 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Jan 06, 17 | Jun 12, 18 | FUJIFILM Corporation |
9994513 | Method for producing novel ali cyclic ester compound, novel alicyclic ester compound, (meth)acrylic copolymer produced by polymerizing said compound, and photosensitive resin composition using said copolymer | Feb 12, 15 | Jun 12, 18 | Mitsubishi Gas Chemical INC. |
9989850 | Photoresist system and method | Dec 03, 14 | Jun 05, 18 | Taiwan Semiconductor Manufacturing Company, Ltd. |
9989849 | Chemically amplified resist material and resist pattern-forming method | Nov 09, 16 | Jun 05, 18 | JSR Corporation |
9991156 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Jun 03, 16 | Jun 05, 18 | IBM Corporation |
9991259 | Semiconductor device | Dec 21, 16 | Jun 05, 18 | Samsung Electronics Co., Ltd. |
9991294 | Thin film transistor and method for manufacturing the same, array substrate, and electronic apparatus | Aug 07, 13 | Jun 05, 18 | BOE Technology Group Co. Ltd. |
9991116 | Method for forming high aspect ratio patterning structure | Dec 21, 16 | Jun 05, 18 | SHANGHAI HUALI MICROELECTRONICS CORPORATION |
9991114 | Photolithographic patterning of electronic devices | Jun 23, 17 | Jun 05, 18 | Orthogonal, Inc. |
9991206 | Package method including forming electrical paths through a mold layer | Apr 05, 17 | Jun 05, 18 | Powertech Technology Inc. |
9989852 | Positive photosensitive resin composition, cured film formed by curing same, and optical device equipped with same | Jul 01, 14 | Jun 05, 18 | TORAY INDUSTRIES, INC. |
9991159 | Semiconductor device manufacture method | Mar 03, 17 | Jun 05, 18 | TOSHIBA MEMORY CORPORATION |