H01L 21/027

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Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
RE49794 SRAM design to facilitate single fin cut in double sidewall image transfer processOct 08, 20Jan 09, 24Adeia Semiconductor Solutions LLC
RE49297 Lithographic apparatus and a device manufacturing methodOct 18, 19Nov 15, 22ASML Netherlands B.V.
9996007 Polymer for preparing resist underlayer film, resist underlayer film composition containing the polymer and method for manufacturing semiconductor device using the compositionJul 12, 16Jun 12, 18SK INNOVATION CO., LTD.; SK Global Chemical Co., Ltd.;
9997336 Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDPApr 26, 16Jun 12, 18Taiwan Semiconductor Manufacturing Co Ltd.
9996008 Photoresist pattern trimming methodsAug 22, 16Jun 12, 18Rohm and Haas Electronic Materials LLC
9997371 Atomic layer etch methods and hardware for patterning applicationsApr 28, 17Jun 12, 18Lam Research Corporation
9996004 EUV photopatterning of vapor-deposited metal oxide-containing hardmasksNov 20, 15Jun 12, 18Lam Research Corporation
9997636 Fabricating method of optical sensing deviceAug 22, 17Jun 12, 18Au Optronics Corp.
9996003 Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic deviceJan 06, 17Jun 12, 18FUJIFILM Corporation
9994513 Method for producing novel ali cyclic ester compound, novel alicyclic ester compound, (meth)acrylic copolymer produced by polymerizing said compound, and photosensitive resin composition using said copolymerFeb 12, 15Jun 12, 18Mitsubishi Gas Chemical INC.
9989850 Photoresist system and methodDec 03, 14Jun 05, 18Taiwan Semiconductor Manufacturing Company, Ltd.
9989849 Chemically amplified resist material and resist pattern-forming methodNov 09, 16Jun 05, 18JSR Corporation
9991156 Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogsJun 03, 16Jun 05, 18IBM Corporation
9991259 Semiconductor deviceDec 21, 16Jun 05, 18Samsung Electronics Co., Ltd.
9991294 Thin film transistor and method for manufacturing the same, array substrate, and electronic apparatusAug 07, 13Jun 05, 18BOE Technology Group Co. Ltd.
9991116 Method for forming high aspect ratio patterning structureDec 21, 16Jun 05, 18SHANGHAI HUALI MICROELECTRONICS CORPORATION
9991114 Photolithographic patterning of electronic devicesJun 23, 17Jun 05, 18Orthogonal, Inc.
9991206 Package method including forming electrical paths through a mold layerApr 05, 17Jun 05, 18Powertech Technology Inc.
9989852 Positive photosensitive resin composition, cured film formed by curing same, and optical device equipped with sameJul 01, 14Jun 05, 18TORAY INDUSTRIES, INC.
9991159 Semiconductor device manufacture methodMar 03, 17Jun 05, 18TOSHIBA MEMORY CORPORATION

Showing 1 to 20 of 1481 results