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| RE48046 | Lithography system, sensor and measuring method | Aug 26, 14 | Jun 09, 20 | ASML NETHERLANDS B.V. |
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| RE47561 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | May 09, 16 | Aug 06, 19 | NuFlare Technology, Inc. |
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| RE47287 | Lithography system, sensor, converter element and method of manufacture | Jan 22, 15 | Mar 12, 19 | Mapper Lithography IP B.V. |
| RE47271 | Imprint recipe creating device and imprint device | Jun 03, 16 | Mar 05, 19 | TOSHIBA MEMORY CORPORATION |
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| 9994442 | Method for arranging fine particles on substrate by physical pressure | Apr 09, 10 | Jun 12, 18 | Industry - University Cooperation Foundation Sogang University |