C23G 1/16

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Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
9796953 Cleaning liquid for lithography and method for cleaning substrateOct 28, 15Oct 24, 17TOKYO OHKA KOGYO CO., LTD.
7435301 Cleaning solution of silicon germanium layer and cleaning method using the sameApr 13, 05Oct 14, 08SAMSUNG ELECTRONICS CO., LTD.
6419754 Endpoint detection and novel chemicals in copper strippingAug 18, 99Jul 16, 02CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
5853490 Use of bicarbonates and carbonates in metal cleaning formulations to inhibit flash rustingFeb 06, 96Dec 29, 98CHURCH & DWIGHT CO., INC.
4576730 Method and composition for cleaning and protecting metalMar 18, 85Mar 18, 86Touchstone Corporation