| 2025/0034,719 | APPARATUS AND METHOD OF TREATING SUBSTRATE | Jun 26, 24 | Jan 30, 25 | SEMES CO., LTD. |
| 2025/0019,835 | ETCHING DEVICE AND ETCHING SYSTEM | Aug 26, 24 | Jan 16, 25 | Cloeren Technology GmbH; Steinbeis Transfer GmbH; |
| 2025/0006,535 | SUBSTRATE PROCESSING SYSTEM | Jun 26, 24 | Jan 02, 25 | Not available |
| 2025/0006,536 | SUBSTRATE TREATMENT SYSTEM | Jun 26, 24 | Jan 02, 25 | Not available |
| 2024/0410,057 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | Mar 25, 24 | Dec 12, 24 | SEMES CO., LTD.; Research & Business Foundation SUNGKYUNKWAN UNIVERSITY; |
| 2024/0309,515 | ETCHING DEVICE | May 29, 24 | Sep 19, 24 | Not available |
| 2024/0271,286 | CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD | Apr 26, 24 | Aug 15, 24 | Not available |
| 2024/0253,079 | SUBSTRATE PROCESSING METHOD | Apr 12, 24 | Aug 01, 24 | Not available |
| 2024/0124,984 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE | Oct 10, 23 | Apr 18, 24 | Not available |
| 2024/0084,458 | SUBSTRATE PROCESSING METHOD | Nov 22, 23 | Mar 14, 24 | Not available |
| 2024/0050,980 | AUTOMOTIVE PART IDENTIFICATION MARKING SYSTEM | Oct 24, 23 | Feb 15, 24 | Not available |
| 2024/0035,168 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | Jul 19, 23 | Feb 01, 24 | Not available |
| 2023/0366,100 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | Apr 11, 23 | Nov 16, 23 | Not available |
| 2023/0203,669 | SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD | Dec 22, 22 | Jun 29, 23 | Not available |
| 2023/0160,071 | PROCESS CONTROL SYSTEM AND OPERATING METHOD THEREFOR | Feb 18, 21 | May 25, 23 | POSCO |
| 2023/0151,494 | CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD | Feb 24, 22 | May 18, 23 | Not available |
| 2022/0356,584 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | May 03, 22 | Nov 10, 22 | Not available |
| 2022/0117,092 | CONTINUOUS ETCHING SYSTEM | Jul 29, 19 | Apr 14, 22 | Not available |
| 2021/0078,036 | SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROCESSING METHOD AND FILM FORMATION METHOD | Nov 06, 20 | Mar 18, 21 | Not available |
| 2021/0047,739 | METHOD AND APPARATUS FOR TRANSFER OF TWO-DIMENSIONAL MATERIALS | May 21, 19 | Feb 18, 21 | Not available |