G03F 1/32

Technology



back to "G03F 1/32" profile

More Results

Showing 1 to 20 of 163 results

Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
2025/0044,677 MASK BLANKOct 17, 24Feb 06, 25501 Hoya Corporation
2025/0036,021 EXTREME ULTRAVIOLET LITHOGRAPHY METHOD AND EUV PHOTOMASKJul 28, 23Jan 30, 25Not available
2024/0427,229 MANUFACTURING METHOD FOR PHOTOMASK, AND PHOTOMASKJun 05, 24Dec 26, 24Not available
2024/0393,675 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICEAug 07, 24Nov 28, 24501 Hoya Corporation
2024/0361,683 MASK BLANK AND PHASE SHIFT MASKMar 31, 22Oct 31, 24501 Hoya Corporation
2024/0345,468 BLANK MASK AND PHOTOMASK USING THE SAMEJun 21, 24Oct 17, 24SK enpulse Co., Ltd.
2024/0329,516 PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHYAug 25, 23Oct 03, 24S&S TECH CO., LTD.
2024/0248,389 APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE SAMEJan 15, 24Jul 25, 24Not available
2024/0248,390 APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE SAMEJan 15, 24Jul 25, 24Not available
2024/0210,814 REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, REFLECTIVE MASK FOR EUV LITHOGRAPHY, AND METHOD FOR MANUFACTURING SAMEMar 06, 24Jun 27, 24AGC INC.
2024/0184,194 MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICEJan 21, 22Jun 06, 24501 Hoya Corporation
2024/0184,195 METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKSJan 12, 24Jun 06, 24Taiwan Semiconductor Manufacturing Company Ltd.
2024/0176,224 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKDec 22, 23May 30, 24AGC Inc.
2024/0152,045 PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND METHOD FOR MODIFYING PHASE SHIFT MASKMar 03, 22May 09, 24Not available
2024/0134,268 LITHOGRAPHY MASKJan 03, 24Apr 25, 24Not available
2024/0094,623 ATTENUATED PHASE SHIFT MASK FOR TALBOT LITHOGRAPHYAug 30, 22Mar 21, 24Not available
2024/0069,431 METHOD OF MANUFACTURING PHOTO MASKSFeb 16, 23Feb 29, 24Not available
2024/0061,324 BLANK MASK AND PHOTOMASK USING THE SAMEAug 17, 23Feb 22, 24SK enpulse Co., Ltd.
2024/0053,672 MASK BLANK, METHOD FOR MANUFACTURING TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICEJan 18, 22Feb 15, 24501 Hoya Corporation
2024/0045,319 REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, MASK BLANK FOR EUV LITHOGRAPHY, AND MANUFACTURING METHODS THEREOFOct 17, 23Feb 08, 24AGC Inc.

Showing 1 to 20 of 163 results