G03F 1/48

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Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
2025/0102,898 REFLECTIVE MASK BLANK AND MANUFACTURING METHOD OF REFLECTIVE MASKSep 04, 24Mar 27, 25Shin-Etsu Chemical Co., Ltd.
2025/0068,054 Mask and Reticle Protection with Atomic Layer Deposition (ALD)Nov 13, 24Feb 27, 25Not available
2025/0036,020 REFLECTIVE MASK BLANK, REFLECTIVE MASK BLANK MANUFACTURING METHOD, REFLECTIVE MASK, AND REFLECTIVE MASK MANUFACTURING METHODOct 09, 24Jan 30, 25AGC Inc.
2025/0004,360 REFLECTIVE MASK BLANK AND REFLECTIVE MASKSep 13, 24Jan 02, 25AGC Inc.
2024/0427,228 PHOTOMASK BLANK, PHOTOMASK, AND MANUFACTURING METHOD OF PHOTOMASKJun 12, 24Dec 26, 24Kioxia Corporation
2024/0393,678 REMOVING METHOD, REMOVAL APPARATUS, IMPRINT APPARATUS, REPLICA MANUFACTURING APPARATUS, AND ARTICLE MANUFACTURING METHODApr 18, 24Nov 28, 24Not available
2024/0377,719 SUBSTRATE WITH MULTILAYER REFLECTIVE FILM REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICESep 22, 22Nov 14, 24501 Hoya Corporation
2024/0357,791 PROCESS METHOD FOR IMPROVING SRAM OPERATING SPEEDMar 28, 24Oct 24, 24Shanghai Huali Integrated Circuit Corporation
2024/0288,763 REFLECTIVE PHOTOMASK AND METHOD FOR MANUFACTURING REFLECTIVE PHOTOMASKJun 02, 22Aug 29, 24Not available
2024/0280,890 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKApr 29, 24Aug 22, 24AGC Inc.
2024/0241,433 REFLECTIVE MASK BLANK AND REFLECTIVE MASKMar 29, 24Jul 18, 24AGC Inc.
2024/0241,455 ELECTRONIC DEVICEDec 14, 23Jul 18, 24Chimei Innolux Corporation
2024/0231,214 SUBSTRATE WITH MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICEFeb 22, 22Jul 11, 24501 Hoya Corporation
2024/0231,219 HARD MASK AND SEMICONDUCTOR DEVICE COMPRISING THE SAMESep 19, 23Jul 11, 24Samsung Electronics Co., Ltd.
2024/0210,814 REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, REFLECTIVE MASK FOR EUV LITHOGRAPHY, AND METHOD FOR MANUFACTURING SAMEMar 06, 24Jun 27, 24AGC INC.
2024/0184,193 MASK BLANK, REFLECTIVE MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICEMay 06, 22Jun 06, 24501 Hoya Corporation
2024/0176,224 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKDec 22, 23May 30, 24AGC Inc.
2024/0176,226 METHOD FOR FABRICATING EUV MASK AND PHOTOMASK USING THE EUV MASKFeb 05, 24May 30, 24Not available
2024/0176,245 PHOTOLITHOGRAPHY PATTERNING METHODFeb 07, 24May 30, 24Not available
2024/0168,370 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKOct 20, 23May 23, 24AGC Inc.

Showing 1 to 20 of 87 results