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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

• UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ngo, Khai D T	Blacksburg, US	13	1523
Xie, Huikai	Gainesville, US	39	895

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 27, 2010	US,7704868,B2   US7704868B2	GRANTED PATENT AS SECOND PUBLICATION
July 17, 2008	US,20080169553,A1   US20080169553A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7704868

Fabrication of a micro-electromechanical system (MEMS) device from a complementary metal oxide semiconductor (CMOS)

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