Advanced Metrology Systems LLC
Patent Owner
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- 3 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Nov 23, 2010 most recent publication
Details
- 3 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 387 Total Citation Count
- May 17, 1993 Earliest Filing
- 20 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
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Technology
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Expired/Abandoned/Withdrawn Patents
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Title
Status
Filing Date
Issue/Pub Date
Intl Class
7839509 Method of measuring deep trenches with model-based optical spectroscopyExpiredJun 30, 06Nov 23, 10[G01B]
7365864 Method of determining properties of patterned thin film metal structures using transient thermal responseExpiredDec 10, 03Apr 29, 08[G01B]
2008/0049,214 Measuring Diffractive Structures By Parameterizing Spectral FeaturesAbandonedAug 28, 07Feb 28, 08[G01B]
7327468 Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin filmsExpiredJul 26, 02Feb 05, 08[G01B]
6812479 Sample positioning method for surface optical diagnostics using video imagingExpiredJun 05, 01Nov 02, 04[G01V]
6795198 Method and device for measuring thin films and semiconductor substrates using reflection mode geometryExpiredMay 28, 98Sep 21, 04[G01B]
6734982 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structureExpiredFeb 28, 01May 11, 04[G01B]
6393915 Method and device for simultaneously measuring multiple properties of multilayer filmsExpiredJul 29, 99May 28, 02[G01H, G01B]
6256100 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structureExpiredApr 27, 98Jul 03, 01[G01N]
6175421 Method and apparatus for measuring material properties using transient-grating spectroscopyExpiredMay 25, 99Jan 16, 01[G01B]
6118533 Method and apparatus for measuring the concentration of ions implanted in semiconductor materialsExpiredSep 10, 97Sep 12, 00[G01B]
6075602 Method and apparatus for measuring material properties using transient-grating spectroscopyExpiredMay 25, 99Jun 13, 00[G01B]
6069703 Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structureExpiredMay 28, 98May 30, 00[G01N]
6052185 Method and apparatus for measuring the concentration of ions implanted in semiconductor materialsExpiredJun 30, 97Apr 18, 00[G01B]
6016202 Method and apparatus for measuring material properties using transient-grating spectroscopyExpiredJun 30, 97Jan 18, 00[G01B]
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