LAMBDA PHYSIK AG

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01S DEVICES USING STIMULATED EMISSION389
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 192

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7227881 Master oscillator--power amplifier excimer laser systemMar 09, 06Jun 05, 07[H01S]
RE38039 Laser for generating narrow-band radiationJun 01, 00Mar 18, 03[H01S]
5729565 Discharge unit and electrode for a pulsed discharge laserNov 07, 96Mar 17, 98[H01S]
5676866 Apparatus for laser machining with a plurality of beamsApr 14, 95Oct 14, 97[B23K]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6941259 Laser software control systemExpiredFeb 22, 01Sep 06, 05[0000]
6907058 Energy monitor for molecular fluorine laserExpiredJan 25, 01Jun 14, 05[H01S]
2005/0083,984 Laser system sealingAbandonedOct 12, 04Apr 21, 05[H01S]
2005/0058,172 System and method for segmented electrode with temporal voltage shiftingAbandonedSep 08, 04Mar 17, 05[H01S]
2005/0002,427 Cooled electrodes for high repetition excimer or molecular fluorine lasersAbandonedApr 28, 04Jan 06, 05[H01S]
2004/0202,220 Master oscillator-power amplifier excimer laser systemAbandonedOct 30, 03Oct 14, 04[H01S]
2004/0190,577 Fast linear motor for wavelength variation for lithography lasersAbandonedFeb 10, 04Sep 30, 04[H01S]
2004/0156,414 Excimer or molecular fluorine laser with bandwidth of less than 0.2 pmAbandonedDec 09, 03Aug 12, 04[H01S]
2004/0141,182 Monitoring of spectral purity and advanced spectral characteristics of a narrow bandwidth excimer laserAbandonedDec 10, 03Jul 22, 04[G01B]
6763048 Line narrowing of molecular fluorine laser emissionExpiredJun 15, 01Jul 13, 04[H01S]
6760358 Line-narrowing optics module having improved mechanical performanceExpiredMay 07, 02Jul 06, 04[H01S]
6757315 Corona preionization assembly for a gas laserExpiredOct 19, 00Jun 29, 04[H01S]
6747741 Multiple-pass interferometric deviceExpiredOct 09, 01Jun 08, 04[G02B]
2004/0101,018 Suspension system for laser discharge unitAbandonedAug 22, 03May 27, 04[H01S]
6738406 Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nmExpiredJul 12, 02May 18, 04[H01S]
6735225 Chirp compensation method and apparatusExpiredJun 06, 02May 11, 04[H01S]
6735232 Laser with versatile output energyExpiredJan 29, 01May 11, 04[H01S]
6735233 Gas discharge laser with means for removing gas impuritiesExpiredJun 12, 02May 11, 04[H01S]
6727731 Energy control for an excimer or molecular fluorine laserExpiredOct 16, 00Apr 27, 04[H01S]
6721345 Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasersExpiredJul 12, 01Apr 13, 04[H01S]

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