LAMBDA PHYSIK AG
Patent Owner
Stats
- 4 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 05, 2007 most recent publication
Details
- 4 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 2,885 Total Citation Count
- Jul 18, 1977 Earliest Filing
- 142 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
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Recent Patents
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Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2005/0058,172 System and method for segmented electrode with temporal voltage shiftingAbandonedSep 08, 04Mar 17, 05[H01S]
2005/0002,427 Cooled electrodes for high repetition excimer or molecular fluorine lasersAbandonedApr 28, 04Jan 06, 05[H01S]
2004/0202,220 Master oscillator-power amplifier excimer laser systemAbandonedOct 30, 03Oct 14, 04[H01S]
2004/0190,577 Fast linear motor for wavelength variation for lithography lasersAbandonedFeb 10, 04Sep 30, 04[H01S]
2004/0156,414 Excimer or molecular fluorine laser with bandwidth of less than 0.2 pmAbandonedDec 09, 03Aug 12, 04[H01S]
2004/0141,182 Monitoring of spectral purity and advanced spectral characteristics of a narrow bandwidth excimer laserAbandonedDec 10, 03Jul 22, 04[G01B]
6760358 Line-narrowing optics module having improved mechanical performanceExpiredMay 07, 02Jul 06, 04[H01S]
6738406 Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nmExpiredJul 12, 02May 18, 04[H01S]
6721345 Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasersExpiredJul 12, 01Apr 13, 04[H01S]
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