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Abstract

The travel range is extended for electrostatically actuated micro mirrors used as attenuators, modulators and switches in optical networks by the use of dielectrically coated, preferably with Silicon dioxide, inner surfaces. Oxide charge and oxide capacitance combine to expand the travel range of the mirrors before snap down, at the expense of increased applied bias voltage. This method of travel range extension is preferred over other range extension methods due to its simplicity, reproducibility, and ease of manufacture, as well as benefits of decreased stiction and inhibited electrode shorting. A method for the manufacture of the devices is also disclosed.

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